JPH04100254U - - Google Patents
Info
- Publication number
- JPH04100254U JPH04100254U JP212491U JP212491U JPH04100254U JP H04100254 U JPH04100254 U JP H04100254U JP 212491 U JP212491 U JP 212491U JP 212491 U JP212491 U JP 212491U JP H04100254 U JPH04100254 U JP H04100254U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP212491U JPH04100254U (en]) | 1991-01-28 | 1991-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP212491U JPH04100254U (en]) | 1991-01-28 | 1991-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04100254U true JPH04100254U (en]) | 1992-08-31 |
Family
ID=31730040
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP212491U Withdrawn JPH04100254U (en]) | 1991-01-28 | 1991-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04100254U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022145992A (ja) * | 2021-03-22 | 2022-10-05 | 株式会社Kokusai Electric | 基板処理装置及び半導体装置の製造方法 |
-
1991
- 1991-01-28 JP JP212491U patent/JPH04100254U/ja not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022145992A (ja) * | 2021-03-22 | 2022-10-05 | 株式会社Kokusai Electric | 基板処理装置及び半導体装置の製造方法 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19950518 |